MEMS微变形镜单元间耦合的优化控制研究

doi:10.3969/j.issn.0253-2778.2010.04.011

中国科学技术大学学报 ›› 2010, Vol. 40 ›› Issue (4): 395-399.DOI: 10.3969/j.issn.0253-2778.2010.04.011

MEMS微变形镜单元间耦合的优化控制研究

刘勇

中国科学技术大学精密机械与精密仪器系，安徽合肥 230027

收稿日期:2008-08-08 修回日期:2008-11-30 出版日期:2010-04-30 发布日期:2010-04-30
通讯作者: 褚家如
作者简介:刘勇，男，1985年生，硕士生. 研究方向：变形镜性能分析，微悬臂梁研究. E-mail: liuyong1@mail.ustc.edu.cn
基金资助:
国家自然科学基金（50605061）资助.

Coupling control of actuators for MEMS-based deformable mirror

LIU Yong

Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China

Received:2008-08-08 Revised:2008-11-30 Online:2010-04-30 Published:2010-04-30

摘要/Abstract

摘要： 通过计算MEMS微变形镜校正畸变波面后的残余误差，研究不同单元间耦合情况对变形镜校正效果的影响.针对连续镜面MEMS微变形镜单个致动器单元工作时，相邻及以外的单元都会有一个变形量，用耦合系数来表征单元工作时对相邻单元变形量的影响程度.以单元间距为3 mm的10×10单元阵列MEMS微变形镜为例，研究了变形镜校正不同畸变波面时，最佳耦合系数与波面畸变因素对应关系.当校正对象为前20阶Zernike多项式波面，此变形镜的最佳耦合系数为10%.分析了单元间距分别为2，25，3，35，4 mm时，10×10单元阵列MEMS微变形镜校正效果的变化情况；不同单元间距对应的最佳耦合系数分别为12%，11%，10%，9%，8%.

关键词: MEMS, 变形镜, 影响函数, 耦合系数

Abstract: Based on the correction of the residual error of wave-front correction, the relationship between the coupling of actuators and correction capability of MEMS-based deformable mirror (DM) is analyzed. When a single actuator of the continuous surface DM works, it creates a displacement at the other actuators, which is described using coupling coefficient (cc). For a MEMS-based DM with a 10×10 actuator array, with the distance between two adjacent actuators (b) being 3 mm, correcting the first 20 Zernike modes, the best coupling coefficient is 10%. Different distances between two adjacent actuators (b) correspond to different correction capabilities and different coupling coefficients. Corresponding to b of 2, 25, 3, 35, and 4 mm, the best coupling coefficient of the DM is 12%, 11%, 10%, 9%, and 8%, respectively.

Key words: MEMS, deformable mirror, influence function, coupling coefficient

刘勇，许晓慧，李保庆，张晋弘，褚家如. MEMS微变形镜单元间耦合的优化控制研究[J]. 中国科学技术大学学报, 2010, 40(4): 395-399.

LIU Yong, XU Xiaohui, LI Baoqing, ZHANG Jinhong, CHU Jiaru. Coupling control of actuators for MEMS-based deformable mirror[J]. Journal of University of Science and Technology of China, 2010, 40(4): 395-399.

MEMS微变形镜单元间耦合的优化控制研究

Coupling control of actuators for MEMS-based deformable mirror

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