Nondestructive testing of grating imperfections using  grating-based X-ray phase-contrast imaging

doi:10.3969/j.issn.0253-2778.2016.08.004

Journal of University of Science and Technology of China ›› 2016, Vol. 46 ›› Issue (8): 642-651.DOI: 10.3969/j.issn.0253-2778.2016.08.004

• Original Paper • Previous Articles

Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging

ZHANG Can, WANG Shenghao, HAN Huajie, YANG Meng, SHAO Qigang, HU Renfang, GAO Kun, LIU Gang

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230027, China

Received:2016-03-04 Revised:2016-05-16 Accepted:2016-05-16 Online:2016-05-16 Published:2016-05-16
Contact: LIU Gang
About author:ZHANG Can, male, born in 1993, master. Research field: X-ray phase-contrast imaging. E-mail: zcan@mail.ustc.edu.cn
Supported by:
Supported by the Major State Basic Research Development Program (2012CB825800), the Science Fund for Creative Research Groups (11321503), the Knowledge Innovation Program of the Chinese Academy of Sciences (KJCX2-YW-N42), the National Natural Science Foundation of China (11179004, 10979055, 11205189, and 11205157) and the Fundamental Research Funds for the Central Universities (WK2310000021).

Abstract

Abstract: We reported the usage of grating-based X-ray phase-contrast imaging in nondestructive testing of grating imperfections. It was found that electroplating flaws could be easily detected by conventional absorption signal, and in particular, we observed that the grating defects resulting from uneven ultraviolet exposure could be clearly discriminated with phase-contrast signal. The experimental results demonstrate that grating-based X-ray phase-contrast imaging, with a conventional low-brilliance X-ray source, a large field of view and a reasonable compact setup, which simultaneously yields phase- and attenuation-contrast signal of the sample, can be ready-to-use in fast nondestructive testing of various imperfections in gratings and other similar photoetching products.

Key words: X-ray phase contrast imaging, nondestructive testing, grating quality, industrial application

CLC Number:

O434

ZHANG Can, WANG Shenghao, HAN Huajie, YANG Meng, SHAO Qigang, HU Renfang, GAO Kun, LIU Gang. Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging[J]. Journal of University of Science and Technology of China, 2016, 46(8): 642-651.

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Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging

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