[1] CHAUDHRY A,KUMMER M J. Controlling short-channel effects in deep-submicron SOI MOSFETs for improved reliability: A review[J]. IEEE Transactions on Device and Materials Reliability, 2004, 4(1): 99-109. [2] 曹磊,刘红侠. 考虑量子效应的高k栅介质SOI MOSFET特性研究 [J]. 物理学报, 2012, 61(24): 470-475. [3] ITOH A, SAITOH M, ASADA M. Very short channel metal-gate Schottky source/drain SOI-PMOSFETs and their short channel effect [C]// 58th DRC Device Research Conference. Denver, USA:IEEE Press, 2000: 77-78. [4] YOUNG K K. Short-channel effect in fully depleted SOI MOSFET’s [J]. IEEE Transactions on Electron Devices, 1989, 36(2): 399-402. [5] TSORMPATZOGLOU A, DIMITRIADIS C A, CLERC R, et al. Semianalytical modeling of short-channel effects in lightly doped silicon trigate MOSFETs [J]. IEEE Transactions on Electron Devices, 2008, 55(10): 2623-2631. [6] WANG H P. New analytical models of subthreshold surface potential and subthreshold cur current of fully depleted short-channel silicon-on-insulator MOSFETs with halo or pocket implantation [J]. Japanese Journal of Applied Physics, 2014, 53(6): 064301. [7] SARAMEKALA G K, TIWARI P K. An analytical threshold voltage model of fully depleted (FD) recessed-source/drain (Re-S/D) SOI MOSFETs with back-gate control [J]. Journal of Electronic Materials, 2016, 45(10): 1-8. [8] BANNA S R, CHAN M, KO P, et al. Threshold voltage model for deep-submicrometer fully depleted SOI MOSFET’s [J]. IEEE Transactions on Electron Devices, 1995, 42(11): 1949-1955. [9] CHANG K M, WANG H P. A simple 2D analytical threshold voltage model for fully depleted short-channel silicon-on-insulator MOSFETs [J]. Semiconductor Science & Technology, 2004, 19(12): 1397-1405. [10] MALAKAR T D, BASU S, BHATTACHARYYA P, et al. Computationally comprehensive and efficient generalized poisson’s solution for better nanoscale SOI MOSFET [C]// International Conference on Computational Intelligence and Communication Networks. Bhopal, India : IEEE Press, 2014: 1016-1020. [11] 盛剑霓, 马齐爽, 袁斌.电磁场与电磁波分析中的半解析法的理论方法与应用 [M].北京:科学出版社, 2006. [12] 柯导明, 陈军宁. 数学物理方法[M]. 北京: 机械工业出版社, 2008.
() ( |