基于X射线相衬成像技术的光栅品质无损检测

doi:10.3969/j.issn.0253-2778.2016.08.004

中国科学技术大学学报 ›› 2016, Vol. 46 ›› Issue (8): 642-651.DOI: 10.3969/j.issn.0253-2778.2016.08.004

• 论著 • 上一篇

基于X射线相衬成像技术的光栅品质无损检测

张灿，王圣浩，韩华杰，杨萌，邵其刚，胡仁芳，高昆，刘刚

中国科学技术大学国家同步辐射实验室，安徽合肥 230027

收稿日期:2016-03-04 修回日期:2016-05-16 接受日期:2016-05-16 出版日期:2016-05-16 发布日期:2016-05-16

Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging

ZHANG Can, WANG Shenghao, HAN Huajie, YANG Meng, SHAO Qigang, HU Renfang, GAO Kun, LIU Gang

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230027, China

Received:2016-03-04 Revised:2016-05-16 Accepted:2016-05-16 Online:2016-05-16 Published:2016-05-16
Contact: LIU Gang
About author:ZHANG Can, male, born in 1993, master. Research field: X-ray phase-contrast imaging. E-mail: zcan@mail.ustc.edu.cn
Supported by:
Supported by the Major State Basic Research Development Program (2012CB825800), the Science Fund for Creative Research Groups (11321503), the Knowledge Innovation Program of the Chinese Academy of Sciences (KJCX2-YW-N42), the National Natural Science Foundation of China (11179004, 10979055, 11205189, and 11205157) and the Fundamental Research Funds for the Central Universities (WK2310000021).

摘要/Abstract

摘要： 提出了一种基于X射线光栅像衬成像技术的光栅品质无损检测方法.我们发现利用传统的吸收信号很容易检测到光栅电镀缺陷，而由非均匀紫外曝光导致的光栅缺陷则可以通过相衬信号进行检测.实验结果证明，在一种利用实验室光源同时产生吸收信号和相位信号的大视场实验平台上，X射线相位衬成像技术可以很好地运用到光栅缺陷的快速检测以及其他类似的电刻产品的品质检测上.

关键词: X射线相衬成像, 无损检测, 光栅品质, 工业运用

Abstract: We reported the usage of grating-based X-ray phase-contrast imaging in nondestructive testing of grating imperfections. It was found that electroplating flaws could be easily detected by conventional absorption signal, and in particular, we observed that the grating defects resulting from uneven ultraviolet exposure could be clearly discriminated with phase-contrast signal. The experimental results demonstrate that grating-based X-ray phase-contrast imaging, with a conventional low-brilliance X-ray source, a large field of view and a reasonable compact setup, which simultaneously yields phase- and attenuation-contrast signal of the sample, can be ready-to-use in fast nondestructive testing of various imperfections in gratings and other similar photoetching products.

Key words: X-ray phase contrast imaging, nondestructive testing, grating quality, industrial application

中图分类号:

O434

张灿，王圣浩，韩华杰，杨萌，邵其刚，胡仁芳，高昆，刘刚. 基于X射线相衬成像技术的光栅品质无损检测[J]. 中国科学技术大学学报, 2016, 46(8): 642-651.

ZHANG Can, WANG Shenghao, HAN Huajie, YANG Meng, SHAO Qigang, HU Renfang, GAO Kun, LIU Gang. Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging[J]. Journal of University of Science and Technology of China, 2016, 46(8): 642-651.

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基于X射线相衬成像技术的光栅品质无损检测

Nondestructive testing of grating imperfections using grating-based X-ray phase-contrast imaging

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