PZT压电厚膜的飞秒激光烧蚀及图形化研究

doi:10.3969/j.issn.0253-2778.2010.10.004

中国科学技术大学学报 ›› 2010, Vol. 40 ›› Issue (10): 1011-1015.DOI: 10.3969/j.issn.0253-2778.2010.10.004

PZT压电厚膜的飞秒激光烧蚀及图形化研究

刘爽

1.中国科学技术大学精密机械与精密仪器系，安徽合肥 230027； 2.江苏大学材料科学与工程学院，江苏镇江 212013

收稿日期:2009-10-12 修回日期:2010-05-01 出版日期:2010-10-31 发布日期:2010-10-31
通讯作者: 褚家如
作者简介:刘爽，男，1983年生，博士. 研究方向：PZT压电材料及飞秒激光加工技术. E-mail：lsh@mail.ustc.edu.cn
基金资助:
国家自然科学基金（50875250）和中国科学院知识创新工程方向性项目资助.

Ablation and micromachining of PZT thick films using femtosecond laser

LIU Shuang

1.Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China; 2.School of Material Science and Engineering, Jiangsu University， Zhenjiang 212013, China

Received:2009-10-12 Revised:2010-05-01 Online:2010-10-31 Published:2010-10-31

摘要/Abstract

摘要： 利用飞秒激光实现了对PZT厚膜(十几至上百微米)材料的精确烧蚀和图形化研究.飞秒激光脉宽为130fs，重复频率为1 kHz.首先利用飞秒激光脉冲能量与烧蚀点大小的关系，得到飞秒激光烧蚀PZT厚膜的能量阈值为100 J/cm2，然后利用功率为50~300 mW的飞秒激光对PZT压电厚膜进行烧蚀和图形化研究.结合飞秒激光加工的无热影响和无掩膜等特性，在一定的扫描控制下，可以实现对PZT厚膜高精度和高效率的加工.最后，在功率为300 mW、扫描速率为5 mm/s条件下实现了对PZT厚膜驱动器的图形化.经测试表明，图形化以后，PZT驱动器驱动性能有明显(30%)地提高.

关键词: 飞秒激光, PZT, 图形化, 驱动器

Abstract: Femtosecond laser was used for the ablation and patterning of PZT thick films. The pulse width of the laser was 130 fs, and the repetition rate was 1 kHz. First, based on the relationship between the diameter of the ablated crater and the applied peak fluence, the ablation threshold fluence 100 J/cm2 for PZT was estimated by determining the magnitude of the peek fluence for zero ablated spot diameter (no damage); then, 50 to 300 mW femtosecond laser was used to pattern the PZT thick film actuator accurately and efficiently, the process of which had no heat affected zones and did not need a mask. Under the feed rate of 5 mm/s, the PZT thick film actuator was patterned. The driving ability of the actuator is enhanced by 30% after patterning.

Key words: femtosecond laser, PZT, pattern, actuator

刘爽，褚家如，黄文浩，李保家. PZT压电厚膜的飞秒激光烧蚀及图形化研究[J]. 中国科学技术大学学报, 2010, 40(10): 1011-1015.

LIU Shuang, CHU Jiaru, HUANG Wenhao, LI Baojia. Ablation and micromachining of PZT thick films using femtosecond laser[J]. Journal of University of Science and Technology of China, 2010, 40(10): 1011-1015.

PZT压电厚膜的飞秒激光烧蚀及图形化研究

Ablation and micromachining of PZT thick films using femtosecond laser

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