Journal of University of Science and Technology of China ›› 2010, Vol. 40 ›› Issue (4): 395-399.DOI: 10.3969/j.issn.0253-2778.2010.04.011
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LIU Yong
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Abstract: Based on the correction of the residual error of wave-front correction, the relationship between the coupling of actuators and correction capability of MEMS-based deformable mirror (DM) is analyzed. When a single actuator of the continuous surface DM works, it creates a displacement at the other actuators, which is described using coupling coefficient (cc). For a MEMS-based DM with a 10×10 actuator array, with the distance between two adjacent actuators (b) being 3 mm, correcting the first 20 Zernike modes, the best coupling coefficient is 10%. Different distances between two adjacent actuators (b) correspond to different correction capabilities and different coupling coefficients. Corresponding to b of 2, 25, 3, 35, and 4 mm, the best coupling coefficient of the DM is 12%, 11%, 10%, 9%, and 8%, respectively.
Key words: MEMS, deformable mirror, influence function, coupling coefficient
LIU Yong, XU Xiaohui, LI Baoqing, ZHANG Jinhong, CHU Jiaru. Coupling control of actuators for MEMS-based deformable mirror[J]. Journal of University of Science and Technology of China, 2010, 40(4): 395-399.
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URL: http://just-cn.ustc.edu.cn/EN/10.3969/j.issn.0253-2778.2010.04.011
http://just-cn.ustc.edu.cn/EN/Y2010/V40/I4/395