Journal of University of Science and Technology of China ›› 2013, Vol. 43 ›› Issue (2): 143-150.DOI: 10.3969/j.issn.0253-2778.2013.02.009
Previous Articles Next Articles
NING Zhenzhen
Received:
Revised:
Online:
Published:
Abstract: Nanoporous columnar ZrO2 films were deposited by reactive magnetron sputtering using glancing angle deposition (GLAD) configuration. The influences of deposition angle and target-substrate distance on the optical and structural properties of ZrO2 films were investigated. It is found that the ZrO2 films fabricated using GLAD show a tilted columnar microstructure; the width of the gap between two adjacent columnar crystals is less than 100 nm; the average grain size of ZrO2 films is about 10 nm; and the orientation of some grains can be changed by changing the deposition angle. In addition, with the increase in the deposition angle or/and target-substrate distance, the porosity of ZrO2 film increases while the refractive index and the deposition rate of ZrO2 film decreases. A larger deposition angle tends to increase the column inclination angle while a longer target-substrate distance tends to decrease the column inclination angle. The refractive index and porosity of ZrO2 films deposited at deposition angle of 75° are 156 and 417%, respectively.
Key words: nanoporous columnar, ZrO2 film, glancing angle deposition, magnetron sputtering
NING Zhenzhen, YU Chuanjie, LI Ming, XIE Bin. Preparation and characterization of nanoporous columnar ZrO2 films by reactive magnetron sputtering[J]. Journal of University of Science and Technology of China, 2013, 43(2): 143-150.
0 / / Recommend
Add to citation manager EndNote|Ris|BibTeX
URL: http://just-cn.ustc.edu.cn/EN/10.3969/j.issn.0253-2778.2013.02.009
http://just-cn.ustc.edu.cn/EN/Y2013/V43/I2/143