Research on positioning control of the precision positioning system of the grating ruling machine
SHEN Yuan
1.School of Electronics and Information Engineering, Hefei Normal University, Hefei 230601, China; 2.Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230027, China; 3.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
SHEN Yuan, WANG Yiying, ZHU Changan, QI Xiangdong. Research on positioning control of the precision positioning system of the grating ruling machine[J]. Journal of University of Science and Technology of China, 2014, 44(2): 165-170.