Journal of University of Science and Technology of China ›› 2014, Vol. 44 ›› Issue (2): 165-170.DOI: 10.3969/j.issn.0253-2778.2014.02.013

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Research on positioning control of the precision positioning system of the grating ruling machine

SHEN Yuan   

  1. 1.School of Electronics and Information Engineering, Hefei Normal University, Hefei 230601, China; 2.Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230027, China; 3.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • Received:2013-07-02 Revised:2013-12-18 Online:2014-02-28 Published:2014-02-28

Abstract: The control and experiment research of the precision positioning system of the grating ruling machine were presented. Considering the non-linearity and time-variation characteristics of the precision positioning system, PID feedback control based on BP neural network was utilized in the positioning system. With the functions of self-learning,the parameters of the PID controller were adjusted in real time, and precision positioning could be realize by the PID controller. Experimental result shows that a positioning accuracy within 5 nm was achieved.

Key words: grating ruling machine, precision positioning, BP neural network, PID control