The patterning of microplasma reactor electrode using sputtering image reversal lift-off process
ZHANG Qiuping
1.Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China,Hefei 230027,China; 2.Department of Mechanical Engineering, Anhui University of Technology and Science, Wuhu 241000,China
ZHANG Qiuping, WEN Li, XIANG Weiwei, WANG Hai, CHU Jiaru. The patterning of microplasma reactor electrode using sputtering image reversal lift-off process[J]. Journal of University of Science and Technology of China, 2010, 40(4): 400-405.